Abstract

Microtubular Origami MEMS and NEMS

Oliver Schmidt, Professor & Director, Leibniz-Institut für Festkörper- und Werkstoffforschung

On-chip fabricated nanomembranes are thin, flexible, transferable and can be shaped into 3D microtubular Origami MEMS and NEMS devices. This makes them attractive for a broad range of applications and scientific research fields ranging from novel hybrid heterostructure devices to 3D microsystems both on and off the chip. Microtubular MEMS and NEMS are exploited to construct ultra-compact and ultra-sensitive advanced electronic circuitry, sensors and optofluidic components around fluidic channels towards the implementation of lab-in-a-tube systems. They are also useful to study basic mechanisms of single cancer and stem cell migration, growth and mitosis in realistic 3D confined environments.  Off-chip applications include biomimetic microelectronics for regenerative cuff implants and the development of hybrid microbiorobotic motors for paradigm shifting reproduction technologies and innovative cancer treatment procedures.