Abstract

Wet Parylene-based Sensors

Ellis Meng, Assistant Professor, University of Southern California

The prevailing paradigm for transduction of physical parameters in wet environments is to encapsulate and protect sensing elements originally designed for use in dry environments.  Examples include capacitive and piezoresistive sensors which may require additional protection when intended for use as implantable monitoring devices.  This talk will describe an alternative strategy for sensing in which the underlying principle leverages the presence of the local liquid environment.  Impedimetric sensing is particularly versatile and, when combined with microfabrication, can be adapted for a wide range of applications from force and pressure sensing to flow sensing.