Abstract

Microfluidic Volume Manufacturing on Leading-Edge Imprint and Bonding Equipment

Bernd Dielacher, Business Development Manager, EV Group (EVG)

EV Group is a world leader in wafer-processing solutions for semiconductor, MEMS and nanotechnology applications as well as holds a dominant position in nanoimprint lithography for the photonic and biotechnology market.

This talk will focus on Nanoimprint Lithography (NIL) as a powerful high-volume manufacturing technique that is able to fabricate the most complex and smallest structures and thus is ideally suited for the production of next-generation microfluidic devices. Different NIL technologies such as hot-embossing and UV-NIL with respect to microfluidic device fabrication will be reviewed. The presentation will also discuss microfluidic bonding solutions that are well-aligned with NIL structuring technologies and allow for full high-volume process integration.