Abstract

Microtubular NEMS for On- and Off-Chip Microfluidic Applications

Oliver Schmidt, Professor & Director, Leibniz-Institut für Festkörper- und Werkstoffforschung

Microtubular MEMS with outstanding properties are self-assembled into fully functional and integrative microtubular architectures. This makes them attractive for a broad range of applications and scientific research fields ranging from novel hybrid heterostructure devices to 3D microsystems both on and off the chip. Microtubular MEMS are exploited to construct ultra-compact and ultra-sensitive advanced electronic circuitry, sensors and optofluidic components around fluidic channels towards the implementation of a lab-in-a-tube system. They are also useful to study basic mechanisms of single cancer and stem cell migration, growth and mitosis in realistic 3D confined environments.  Off-chip applications include biomimetic microelectronics for regenerative cuff implants and the development of hybrid microbiorobotic motors for paradigm shifting reproduction technologies.